ANALYSIS OF POSSIBILITY OF GROWTH OF SEVERAL EPITAXIAL LAYERS SIMULTANEOUSLY IN GAS PHASES FRAMEWORK ONE TECHNOLOGICAL PROCESS. ON POSSIBILITY TO CHANGE PROPERTIES OF EPITAXIAL LAYERS
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Author : E.L. Pankratov and E.A. Bulaeva
Affiliation : Nizhny Novgorod State University, 23 Gagarin avenue, Nizhny Novgorod, 603950, Russia
Country : Russia
Category : Digital Signal & Image Processing
Volume, Issue, Month, Year : Vol 6, No 1, January, 2017
Abstract :
ANALYSIS OF POSSIBILITY OF GROWTH OF SEVERAL
EPITAXIAL LAYERS SIMULTANEOUSLY IN GAS PHASES
FRAMEWORK ONE TECHNOLOGICAL PROCESS.
ON POSSIBILITY TO CHANGE PROPERTIES OF EPITAXIAL
LAYERS
Keyword : We analyzed nonlinear model with varying in space and time coefficients of growth of epitaxial layers from gas phase in a vertical reactor with account native convection. We formulate several conditio
Journal/ Proceedings Name : International Journal on Organic Electronics (IJOE)
URL : http://airccse.org/journal/IJOE/papers/6117ijoe01.pdf
User Name : james
Posted 10-02-2017 on 20:44:36 AEDT
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